Semiconductor structure and method

Details Semiconductor structure and method Semiconductor structure and method

1975-02-24

1976-10-12

Larkins, William D.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156 8, 156 17, 357 50, 357 52, 357 56, 357 60, H01L 21308, H01L 2704, H01L 2904

Patent

active

039862003

ABSTRACT:
Semiconductor structure formed from a semiconductor body having an impurity of one conductivity type therein and having a major surface lying in a <100> plane. Moats are provided which extend through the major surface and have spaced side walls lying in a plane different from the <100> plane and at said surface define spaced islands. Layers of protective material are formed on the side walls of the moats. Regions of said impurity of one conductivity type and of greater concentration than that in the body extend downwardly into the body from the protective layers. An insulating material fills the moats and devices are formed in the islands. An insulating layer is formed on said surface and lead means is provided on the insulating layer and extends through the insulating layer to make contact to the devices and extends over the material in said moats to interconnect the devices in the spaced islands. It is desirable that the moats have a generally rectangular configuration with inner and outer perimeters and inner and outer corners. The outer corners are defined by diagonal, generally planar wall portions which lie in either the <110> plane or the <111> plane. If desired, the bottom of the moats can extend downwardly until the side walls form a Vee in cross-section.

REFERENCES:
patent: 3386865 (1968-06-01), Doo
patent: 3728179 (1973-04-01), Davidson et al.
patent: 3766438 (1973-10-01), Castrucci et al.
patent: 3878552 (1975-04-01), Rogers
Doo et al., "Monolithic Semiconductor Structures . . . ," IBM Technical Disclosure Bulletin, vol. 8, No. 4, Sept. 1965, pp. 659-660.
"Electronics Review," Electronics, July 3, 1972, pp. 39 and 41.

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