Semiconductor storage device having a capacitor and a MOS transi

Details Semiconductor storage device having a capacitor and a MOS transi Semiconductor storage device having a capacitor and a MOS transi

1998-09-28

2000-04-04

Saadat, Mahshid

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257295, 257296, 438240, 438396, H01L 27108

Patent

active

060464690

ABSTRACT:
In a semiconductor storage device, a capacitor section is connected with a drain region of a MOS transistor by means of a polysilicon plug. The capacitor section has a lower electrode, a ferroelectric thin film, and an upper electrode stacked in this order. A TiN barrier metal is placed between the lower electrode and the plug. The lower electrode has a lower film made of a platinum-rhodium alloy and an upper film made of a platinum-rhodium alloy oxide which is in contact with the ferroelectric thin film.

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