Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1997-12-29
2000-07-04
Prenty, Mark V.
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257411, 257324, H01L 2976
Patent
active
060842601
ABSTRACT:
An Si oxide film, an oriented paraelectric oxide thin film and an oriented ferroelectric thin film are laminated on an Si single crystal substrate having a region for a source and a drain. A conductor thin film is formed in a portion not covered with an insulating film. A laminated structure formed of the Si oxide film, the oriented paraelectric oxide thin film and the oriented ferroelectric thin film is used as a gate of a transistor. The Si oxide film functions as a carrier injection inhibiting layer.
REFERENCES:
patent: 4888733 (1989-12-01), Mobley
patent: 5436481 (1995-07-01), Egawa et al.
patent: 5572052 (1996-11-01), Kashihara et al.
patent: 5955755 (1999-09-01), Hirai et al.
Hirai Tadahiko
Tarui Yasuo
Asahi Kasei Kogyo Kabushiki Kaisha
Prenty Mark V.
Tarui Yasuo
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