Semiconductor single crystal growing apparatus

Details Semiconductor single crystal growing apparatus Semiconductor single crystal growing apparatus

1996-11-29

1998-03-10

Garrett, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

With means for measuring, testing, or sensing

117 14, 117218, C30B 3500

Patent

active

057256608

ABSTRACT:
A semiconductor single crystal growing apparatus is vertically and telescopically provided with a seed holder. The seed holder comprises a seed-holding member for holding a seed and a suspending bolt for bolting the seed-holding member. The front end of the seed coincides with a datum point when the seed holder is moved to a top dead point.

REFERENCES:
patent: 2842467 (1958-07-01), Landauer et al.
"Modulation of Dopant Segregation by Electric Currents in Czochralski-Type Crystal Growth"; Center for Materials Science & Engineering MIT, Lichtensteiger, et al., (Jun. 1971) pp. 1013-1014.

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