Semiconductor sensor for detecting physical amount without therm

Details Semiconductor sensor for detecting physical amount without therm Semiconductor sensor for detecting physical amount without therm

1994-10-03

1996-07-23

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Diaphragm

73721, 73708, 7351434, 338 42, G01L 906, G01P 1509, H01C 1010

Patent

active

055378820

ABSTRACT:
A sensor for detecting physical amount in which a gauge resistance value is made not to change even when a wiring material presents a yield phenomenon by wiring a wiring material Such as aluminum presenting a yield phenomenon by thermal stress in a stress insensitive direction of a piezogauge.

REFERENCES:
patent: 4530244 (1985-07-01), Starr
patent: 4739381 (1988-04-01), Miura et al.
patent: 4884051 (1989-11-01), Takahashi et al.
patent: 4967605 (1990-11-01), Okada
patent: 5172205 (1992-12-01), French et al.
patent: 5259248 (1993-11-01), Ugai et al.

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