Semiconductor relay unit

Details Semiconductor relay unit Semiconductor relay unit

1994-12-06

1996-09-17

Tran, Minhloan

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

257422, 257686, 257689, 335 78, 335 80, 361819, H01L 2982, H01H 5122

Patent

active

055571328

ABSTRACT:
A silicon substrate is partially removed for forming a movable center portion connected through torsional portions to a stationary portion, and current flows through a coil formed in the movable center portion so that a moving contact formed in the torsional portion comes into contact with a fixed point.

REFERENCES:
patent: 5126709 (1992-06-01), Tanaka et al.
patent: 5148136 (1992-09-01), Kidd

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