Semiconductor read only memory device with memory cells implemen

Details Semiconductor read only memory device with memory cells implemen Semiconductor read only memory device with memory cells implemen

1994-09-13

1996-02-06

Nelms, David C.

Static information storage and retrieval

Systems using particular element

Semiconductive

365104, 257 60, 257 74, G11C 1700, G11C 1134

Patent

active

054901065

ABSTRACT:
A semiconductor mask ROM device has word lines embedded in a surface portion of a silicon substrate, a gate insulating layer covering the word lines and a silicon strips extending over the gate insulating layer and providing channel regions over the word lines, and the silicon strips are physically separated without a thick field oxide layer, thereby increasing the integration density of the memory cells.

REFERENCES:
patent: 4920392 (1990-04-01), Nishiura
patent: 5317534 (1994-05-01), Choi et al.

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