Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Reexamination Certificate
2007-04-17
2007-04-17
Quach, T. N. (Department: 2826)
Active solid-state devices (e.g., transistors, solid-state diode
Test or calibration structure
C257S301000, C257SE27092, C438S014000, C438S018000
Reexamination Certificate
active
11336384
ABSTRACT:
A semiconductor product having a test structure, in which a contact connection short-circuits that source/drain region of a transistor which is connected to an inner capacitor electrode of a trench capacitor by a dopant diffusion region with an interconnect is disclosed. Methods are disclosed for making an electrical measurement, to determine the nonreactive resistance of dopant diffusion regions, the so-called “buried straps”, without the measurement result being corrupted by the nonreactive resistance of a transistor channel. In accordance with one embodiment of the invention having a plurality of electrical connections of the capacitor electrode, static currents can also be conducted through a buried strap and the capacitor electrode. Embodiments are disclosed that make it possible to perform at novel test structures of a semiconductor wafer electrical resistance measurements, which cannot be carried out at memory cells of a memory cell array themselves.
REFERENCES:
patent: 6339228 (2002-01-01), Iyer et al.
patent: 6563160 (2003-05-01), Clevenger et al.
patent: 6853000 (2005-02-01), Felber et al.
patent: 6946678 (2005-09-01), Wu et al.
patent: 2004/0057292 (2004-03-01), Lachenmann et al.
patent: 2004/0061110 (2004-04-01), Felber et al.
patent: 2005/0051765 (2005-03-01), Rosskopf et al.
patent: 2005/0196918 (2005-09-01), Schwerin
patent: 102 42 054 (2004-04-01), None
patent: 102 45 533 (2004-04-01), None
patent: 103 40 714 (2005-05-01), None
Felber Andreas
Lachenmann Susanne
Rosskopf Valentin
Sukman-Praehofer Sibina
Infineon - Technologies AG
Quach T. N.
Slater & Matsil L.L.P.
LandOfFree
Semiconductor product having a semiconductor substrate and a... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Semiconductor product having a semiconductor substrate and a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor product having a semiconductor substrate and a... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3789719