Semiconductor processor liquid spray system with additive blendi

Details Semiconductor processor liquid spray system with additive blendi Semiconductor processor liquid spray system with additive blendi

1993-09-30

1995-04-25

Jenkins, Robert W.

Agitating

Having interrelated feed and discharge means

Recirculating from and to mixing chamber

134 952, 134 953, 1341021, 239127, 239434, 3661605, 3661531, 3661632, B01F 1504

Patent

active

054093104

ABSTRACT:
A semiconductor processor blending system for diluting a concentrated liquid additive into an actively flowing primary liquid. The concentrated additive is stored in a reservoir and transferred to a drained mixing tank via a metering pump. A diluent supply adds a measured amount of diluent to the mixing tank to provide a diluted additive. Primary fluid flows through aspirator-injectors having a suction port which draws from the mixing tank. This provides two-stage dilution which can easily achieve very dilute ratios of the additive.

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