Semiconductor processing system

Details Semiconductor processing system Semiconductor processing system

1999-07-09

2000-09-19

Walberg, Teresa

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

392416, 118724, 118 501, F27B 514

Patent

active

061215813

ABSTRACT:
A semiconductor processing system includes a semiconductor processing chamber, a heat source assembly and a window. The window is located over an opening into a main body of the chamber. The heat source assembly is evacuable to alter the pressure differential across the window.

REFERENCES:
patent: 3623712 (1971-11-01), McNeilly et al.
patent: 5155336 (1992-10-01), Gronet et al.
patent: 5755511 (1998-05-01), Peuse et al.

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