Semiconductor processing spray coating apparatus

Details Semiconductor processing spray coating apparatus Semiconductor processing spray coating apparatus

1995-04-12

1997-08-19

Warden, Jill

Coating apparatus

Projection or spray type

Moving projector

118 58, 118 64, 118302, 118320, 118321, 118683, 118667, B05B 312

Patent

active

056583877

ABSTRACT:
A semiconductor processor for spray coating wafers or other semiconductor articles. The processor has a compartment in which are mounted a wafer transfer, coating station and thermal treatment station. The coating station has a spray processing vessel in which a movable spray-head and rotatable wafer holder. The spray station has coating viscosity control features. An ultrasonic resonating spray-head is precisely supplied with coating from a metering pump. The heat treatment station heat cures the coating and then cools the wafer. The system allows coatings to be applied in relatively uniform conformational layers upon irregular surfaces.

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