Semiconductor processing process control system and its...

Details Semiconductor processing process control system and its... Semiconductor processing process control system and its...

2005-02-08

2005-02-08

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S104000, C700S121000

Reexamination Certificate

active

06853870

ABSTRACT:
A semiconductor processing process control system comprising a skip judgment request receiving section for receiving a request for judgment as to whether a process can be skipped or not. A skip judgment yes
o section searches for a judgment plug-in corresponding to the process to be skipped and a judgment execute section activates the judgment plug-in to make a judgment as to whether the process can be skipped or not on the basis of skip judgment logic in the plug-in. A skip execute section effects skipping of the process if the judgment determines that the process can be skipped.

REFERENCES:
patent: 5694325 (1997-12-01), Fukuda et al.
patent: 5740065 (1998-04-01), Jang et al.
patent: 5898588 (1999-04-01), Morimoto
patent: 6263255 (2001-07-01), Tan et al.
patent: 6385496 (2002-05-01), Irwin et al.
patent: 6399511 (2002-06-01), Tang et al.
patent: 6505090 (2003-01-01), Harakawa
patent: 6-196404 (1994-07-01), None
patent: 8-45804 (1996-02-01), None
patent: 10-256241 (1998-09-01), None
Etsuo Fukuda, et al., “Advancd Process Control System Description of an Easy-To-Use Control System Incorporatring Pluggable Modules,” IEEE International Symposium on Semiconductor Manufacturing, Jun. 1999, pp. 321-324.

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