Semiconductor processing apparatus

Details Semiconductor processing apparatus Semiconductor processing apparatus

2006-11-21

2006-11-21

Koch, George (Department: 1734)

Coating apparatus

Projection or spray type

Plural projectors

C118S300000, C118S315000

Reexamination Certificate

active

07138016

ABSTRACT:
A semiconductor processor for spray coating wafers or other semiconductor articles. The processor has a compartment in which are mounted a wafer transfer, coating station and thermal treatment station. The coating station has a spray processing vessel in which a movable spray-head and rotatable wafer holder. The spray station has coating viscosity control features. An ultrasonic resonating spray-head is precisely supplied with coating from a metering pump. The heat treatment station heat cures the coating and then cools the wafer. The system allows coatings to be applied in relatively uniform conformational layers upon irregular surfaces.

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