Semiconductor processing

Details Semiconductor processing Semiconductor processing

2011-08-23

2011-08-23

Garber, Charles D (Department: 2812)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

Reexamination Certificate

active

08003521

ABSTRACT:
Devices, methods, and systems for semiconductor processing are described herein. A number of method embodiments of semiconductor processing can include forming a silicon layer on a structure, forming an opening through the silicon layer and into the structure, and selectively forming a resistance variable material in the opening such that the resistance variable material does not form on the silicon layer.

REFERENCES:
patent: 5990559 (1999-11-01), Marsh
patent: 6197628 (2001-03-01), Vaartstra et al.
patent: 6204172 (2001-03-01), Marsh
patent: 6204178 (2001-03-01), Marsh
patent: 6218297 (2001-04-01), Marsh
patent: 6218316 (2001-04-01), Marsh
patent: 6271131 (2001-08-01), Uhlenbrock et al.
patent: 6281161 (2001-08-01), Marsh
patent: 6284655 (2001-09-01), Marsh
patent: 6323081 (2001-11-01), Marsh
patent: 6323511 (2001-11-01), Marsh
patent: 6342445 (2002-01-01), Marsh
patent: 6387802 (2002-05-01), Marsh
patent: 6403414 (2002-06-01), Marsh
patent: 6403499 (2002-06-01), Marsh
patent: 6421223 (2002-07-01), Marsh
patent: 6461909 (2002-10-01), Marsh et al.
patent: 6462367 (2002-10-01), Marsh et al.
patent: 6495458 (2002-12-01), Marsh
patent: 6506666 (2003-01-01), Marsh
patent: 6545287 (2003-04-01), Chiang
patent: 6569689 (2003-05-01), Marsh
patent: 6569705 (2003-05-01), Chiang et al.
patent: 6583022 (2003-06-01), Marsh
patent: 6610568 (2003-08-01), Marsh et al.
patent: 6617634 (2003-09-01), Marsh et al.
patent: 6642567 (2003-11-01), Marsh
patent: 6656835 (2003-12-01), Marsh et al.
patent: 6660631 (2003-12-01), Marsh
patent: 6677252 (2004-01-01), Marsh
patent: 6737313 (2004-05-01), Marsh et al.
patent: 6737317 (2004-05-01), Marsh et al.
patent: 6744138 (2004-06-01), Marsh
patent: 6757153 (2004-06-01), Marsh
patent: 6764895 (2004-07-01), Marsh et al.
patent: 6783657 (2004-08-01), Marsh et al.
patent: 6787449 (2004-09-01), Marsh
patent: 6800521 (2004-10-01), Marsh
patent: 6800937 (2004-10-01), Marsh et al.
patent: 6813136 (2004-11-01), Marsh
patent: 6830983 (2004-12-01), Marsh
patent: 6858535 (2005-02-01), Marsh
patent: 6861355 (2005-03-01), Marsh
patent: 6867093 (2005-03-01), Marsh et al.
patent: 6867449 (2005-03-01), Marsh et al.
patent: 6881260 (2005-04-01), Marsh et al.
patent: 6884691 (2005-04-01), Marsh
patent: 6900107 (2005-05-01), Marsh
patent: 6903005 (2005-06-01), Marsh
patent: 6943073 (2005-09-01), Marsh et al.
patent: 6946395 (2005-09-01), Marsh
patent: 7030042 (2006-04-01), Vaartstra et al.
patent: 7052953 (2006-05-01), Marsh
patent: 7060615 (2006-06-01), Marsh
patent: 7087481 (2006-08-01), Vaartstra et al.
patent: 7098503 (2006-08-01), Marsh
patent: 7105065 (2006-09-01), Marsh
patent: 7115528 (2006-10-01), Vaartstra et al.
patent: 7157783 (2007-01-01), Marsh
patent: 7160817 (2007-01-01), Marsh
patent: 7183567 (2007-02-01), Chiang
patent: 7189611 (2007-03-01), Marsh
patent: 7208412 (2007-04-01), Marsh
patent: 7214632 (2007-05-01), Chiang
patent: 7217970 (2007-05-01), Marsh
patent: 7226861 (2007-06-01), Uhlenbrock et al.
patent: 7262132 (2007-08-01), Marsh
patent: 7282408 (2007-10-01), Marsh et al.
patent: 7291920 (2007-11-01), Marsh
patent: 7332442 (2008-02-01), Vaartstra et al.
patent: 7364935 (2008-04-01), Lung
patent: 7365028 (2008-04-01), Marsh
patent: 7368402 (2008-05-01), Vaartstra et al.
patent: 7371429 (2008-05-01), Lee et al.
patent: 7384825 (2008-06-01), Park et al.
patent: 7393785 (2008-07-01), Uhlenbrock et al.
patent: 7416994 (2008-08-01), Quick
patent: 7439195 (2008-10-01), Vaartstra et al.
patent: 7453111 (2008-11-01), Ryoo et al.
patent: 7468108 (2008-12-01), Marsh
patent: 7473637 (2009-01-01), Kraus et al.
patent: 7482284 (2009-01-01), Vaartstra et al.
patent: 2002/0008270 (2002-01-01), Marsh
patent: 2003/0105455 (2003-06-01), Santini et al.
patent: 2004/0040863 (2004-03-01), Lee et al.
patent: 2005/0016869 (2005-01-01), Marsh et al.
patent: 2006/0014367 (2006-01-01), Marsh
patent: 2006/0051963 (2006-03-01), Marsh
patent: 2006/0091492 (2006-05-01), Lee et al.
patent: 2006/0157863 (2006-07-01), Marsh
patent: 2006/0160344 (2006-07-01), Marsh et al.
patent: 2006/0180811 (2006-08-01), Lee et al.
patent: 2006/0249369 (2006-11-01), Marangon et al.
patent: 2006/0261441 (2006-11-01), Marsh et al.
patent: 2007/0063245 (2007-03-01), Marsh
patent: 2007/0075345 (2007-04-01), Marsh
patent: 2007/0077441 (2007-04-01), Marsh
patent: 2007/0092989 (2007-04-01), Kraus et al.
patent: 2007/0166980 (2007-07-01), Lee et al.
patent: 2007/0200243 (2007-08-01), Kraus et al.
patent: 2007/0243491 (2007-10-01), Wu et al.
patent: 2007/0246743 (2007-10-01), Cho et al.
patent: 2007/0263340 (2007-11-01), Marsh
patent: 2008/0006811 (2008-01-01), Philipp et al.
patent: 2008/0217292 (2008-09-01), Millward et al.
patent: 2008/0227303 (2008-09-01), Vaartstra et al.
patent: 2008/0237566 (2008-10-01), An et al.
patent: 2008/0248653 (2008-10-01), Marsh
patent: 2008/0258127 (2008-10-01), Lee et al.
patent: 2008/0280455 (2008-11-01), Quick
patent: 2008/0315270 (2008-12-01), Marsh et al.
patent: 2009/0097305 (2009-04-01), Bae et al.
patent: 2009/0112009 (2009-04-01), Chen et al.
patent: 100861296 (2008-10-01), None
patent: 2008057616 (2008-05-01), None
International Search Report and Written Opinion for related PCT Application PCT/US2010/000733, mailed Oct. 14, 2010 (8 pgs.).

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