Semiconductor probe having wedge shape resistive tip and...

Details Semiconductor probe having wedge shape resistive tip and... Semiconductor probe having wedge shape resistive tip and...

2011-08-09

2011-08-09

Richards, N Drew (Department: 2895)

Active solid-state devices (e.g., transistors, solid-state diode

Point contact device

Reexamination Certificate

active

07994499

ABSTRACT:
A semiconductor probe having a wedge shape resistive tip and a method of fabricating the semiconductor probe is provided. The semiconductor probe includes a resistive tip that is doped with a first impurity, has a resistance region doped with a low concentration of a second impurity having an opposite polarity to the first impurity, and has first and second semiconductor electrode regions doped with a high concentration of the second impurity on both side slopes of the resistive tip. The probe also includes a cantilever having the resistive tip on an edge portion thereof, and an end portion of the resistive tip has a wedge shape.

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