Semiconductor probe and method of writing and reading...

Details Semiconductor probe and method of writing and reading... Semiconductor probe and method of writing and reading...

2006-09-26

2008-12-16

Cygan, Michael (Department: 2855)

Measuring and testing

Surface and cutting edge testing

Roughness

Reexamination Certificate

active

07464584

ABSTRACT:
A semiconductor probe and a method of writing and reading information using the same. The semiconductor probe includes a cantilever and a tip formed on an end portion of the cantilever to write or read information on or from a ferroelectric medium on a surface of which an electrode is formed. The tip includes a resistive region lightly doped with semiconductor impurities and a conductive region heavily doped with the semiconductor impurities. The cantilever includes an electrostatic force generation electrode formed on a bottom surface facing the medium. A contact force between the tip and the medium is adjusted by selectively applying a voltage between the electrode formed on the ferroelectric medium and the electrostatic force generation electrode.

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KR 10-2003-0087372 KIPO machine translation.

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