Semiconductor pressure transducer

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Details

357 74, 357 80, H01L 2312, H01L 2304, H01L 21447

Patent

active

048434540

ABSTRACT:
A semiconductor pressure transducer comprises a metal housing having a cylindrical recess to which an inlet passage of a medium to be measured is opened, a glass base being received in the recess and having a large diameter cylindrical portion and a small diameter cylindrical portion integrally connected to the large diameter cylindrical portion, a rubber O-ring interposed between a bottom of the recess and the base, a metal tubular collar disposed in the recess around the base to come into contact with the bottom of the recess, the collar urged by a caulked portion of the housing to press the base, a sensor chip provided on an end of the small diameter cylinder of the base for generating an electric signal in response to pressure of said medium, an annular clearance provided between the collar and the base, and an introducing passage provided in the base for introducing the medium from the inlet passage to the sensor chip.

REFERENCES:
Journal of Nippondenso Technical Disclosure, one page (108), Mar. 15, 1985, with abstract in English.

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