Semiconductor pressure detecting device and manufacturing method

Details Semiconductor pressure detecting device and manufacturing method Semiconductor pressure detecting device and manufacturing method

1995-10-16

1997-12-30

Saadat, Mahshid D.

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

257787, H01L 2982

Patent

active

057033935

ABSTRACT:
A semiconductor pressure detecting in which a pressure sensing element (2) made of semiconductor having a diaphragm portion (9), a pedestal (8) for supporting the pressure sensing element (2) and wires (5) connected to the pressure sensing element (2) are molded by a molding resin (6) not so as to mold the diaphragm portion (9), characterized in that a silicon resin layer (4) is adhered on an outer surface of the diaphragm portion (9).

REFERENCES:
patent: 4291293 (1981-09-01), Yamada et al.
patent: 4843454 (1989-06-01), Kato et al.
patent: 5266827 (1993-11-01), Kato
patent: 5459351 (1995-10-01), Bender

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