Semiconductor pressure detecting device

Details Semiconductor pressure detecting device Semiconductor pressure detecting device

1998-10-29

2000-10-03

Chaudhuri, Olik

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

257420, H01L 2982

Patent

active

061277134

ABSTRACT:
A semiconductor pressure detecting device comprises a package having a pressure introducing hole; a base plate which has a first through hole and is mounted in the package; a base mounted on the base plate; and a semiconductor pressure sensor chip which is mounted on the base; wherein the base plate has a thickened portion formed around the first through hole and is fixed by welding the circumference of the thickened portion onto the package.

REFERENCES:
patent: 5515732 (1996-05-01), Willcox et al.
patent: 5852320 (1998-12-01), Ichihashi

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