Semiconductor power device with insulated gate and...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S341000

Reexamination Certificate

active

10993917

ABSTRACT:
A semiconductor power device includes an insulated gate and a trench-gate structure. The trench-gate structure is formed on a semiconductor substrate covered by an epitaxial layer. The trench is formed in the semiconductor to form the device gate region. A dielectric coating is provided on the inner and bottom walls of the trench. The gate region includes a conductive spacer layer on the coating layer only on the inner walls of the trench.

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patent: 7045858 (2006-05-01), Matsuda et al.
patent: 2001/0006836 (2001-07-01), Nakamura et al.
patent: 2002/0130359 (2002-09-01), Okumura et al.
patent: 2002/0158287 (2002-10-01), Fujishima et al.
patent: 03425764.2 (2004-05-01), None

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