Semiconductor physical quantity sensor

Details Semiconductor physical quantity sensor Semiconductor physical quantity sensor

1997-02-05

1999-11-23

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351432, 361280, G01P 15125

Patent

active

059879890

ABSTRACT:
A semiconductor physical quantity sensor includes a substrate and a beam structure having movable electrodes and spacing a given distance from an upper surface of the substrate. First fixed electrodes and second fixed electrodes are fixedly provided on the upper surface of the substrate. Each first fixed electrode faces one side of the corresponding movable electrode, while each second fixed electrode faces the other side of the corresponding movable electrode. A laminated structure of a lower layer insulating film, conductive films and an upper layer insulating film is arranged at an upper portion of the substrate. The conductive layers form a first wiring pattern for the first fixed electrodes, a second wiring pattern for the second fixed electrodes and a lower electrode. The first wiring pattern is electrically connected to the first fixed electrodes via openings formed in the upper layer insulating film and anchors of the first fixed electrodes, respectively. The second wiring pattern is electrically connected to the second fixed electrodes via openings formed in the upper layer insulating film and anchors of the second fixed electrodes, respectively. The lower electrode is electrically connected to the beam structure via an opening formed in the upper layer insulating film and an anchor of the beam structure.

REFERENCES:
patent: 5461916 (1995-10-01), Fujii et al.
patent: 5465604 (1995-11-01), Sherman
patent: 5540095 (1996-07-01), Sherman et al.
patent: 5756901 (1998-05-01), Kurle et al.

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