Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Flip chip
Reexamination Certificate
1998-04-20
2001-01-16
Potter, Roy (Department: 2822)
Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
Flip chip
C257S737000, C257S784000, C257S787000
Reexamination Certificate
active
06175159
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a small size semiconductor package, and more particularly, to a semiconductor package of substantially the same size as a semiconductor chip referred to as a chip size package, a semiconductor device using the semiconductor device, and a manufacturing method of the semiconductor device.
2. Description of the Related Art
These days, various apparatus including semiconductor devices, particularly portable apparatus and movable apparatus are being miniaturized and lightened. Semiconductor devices for use in these apparatus are thus desired to be miniaturized and lightened accordingly.
In order to meet the demands, a package of substantially the same size as a semiconductor chip referred to as a chip size package (hereinafter referred to as CSP) has recently been proposed, and some semiconductor devices using such a chip size package are implemented as products.
As a semiconductor device formed with a semiconductor chip mounted on a CSP, for example, as shown in
FIG. 8
, one in which a semiconductor chip
3
is mounted and fixed via bumps
2
on a semiconductor package
1
is known. In this semiconductor device, the semiconductor package
1
comprises a substrate
4
, a conductive connecting pattern
5
formed on one side of the substrate
4
, a conductive connecting pattern
6
formed on the other side of the substrate
4
, and a wiring material
7
formed so as to pierce the substrate
4
for the purpose of making the connecting pattern
5
electrically connected to the connecting pattern
6
. As the material of the substrate
4
, ceramics are mainly used for the purpose of making smaller the difference of the coefficient of thermal expansion between the semiconductor chip
3
and the substrate
4
and thus making smaller the thermal stress to be applied to the bumps
2
and the semiconductor element
3
.
The semiconductor chip
3
is fixed to the substrate
4
of the semiconductor package
1
thus structured with the conductive connecting pattern
5
formed on the one side of the substrate
4
being electrically connected thereto via the bumps
2
provided on a surface
3
a
where the element is formed. External connecting terminals
8
such as solder balls for bonding the conductive connecting pattern
6
to a mother board (not shown) are fixed to the conductive connecting pattern
6
formed on the other side of the substrate
4
. By this, the bumps
2
of the semiconductor chip
3
are electrically connected to the external connecting terminals
8
via the connecting pattern
5
, the wiring material
7
, and the connecting pattern
6
.
The semiconductor chip
3
thus mounted on the semiconductor package
1
is integrally fixed to the semiconductor package
1
by sealing the whole periphery of the junction between the substrate and the semiconductor chip
3
with resin
9
referred to as underfile. It is to be noted that the resin
9
referred to as underfile also performs a function to disperse the above-mentioned thermal stress due to the difference of the coefficient of thermal expansion between the substrate
4
and the semiconductor chip
3
.
FIG. 9
illustrates another example of a semiconductor device formed with a semiconductor element mounted on a CSP. In
FIG. 9
, a semiconductor device
10
is generally referred to as a chip on board (COP). The semiconductor device
10
is formed by mounting and fixing a semiconductor chip
13
via adhesive
12
or the like on a semiconductor package
11
.
The semiconductor package
11
comprises a substrate
14
the material of which is glass epoxy resin or the like, a conductive connecting pattern
15
formed on one side of the substrate
14
, a conductive connecting pattern
16
formed on the other side of the substrate
14
, and a wiring material
17
formed so as to pierce the substrate
14
for the purpose of making the connecting pattern
15
electrically connected to the connecting pattern
16
.
A surface opposite to a surface
13
a
where the element is formed of the semiconductor chip
13
is fixed with the adhesive
12
to one side of the substrate
14
of the semiconductor package
11
thus structured. Further, an electrode (not shown) formed on the surface
13
a
where the element is formed of the semiconductor chip
13
is electrically connected to the connecting pattern
15
of the semiconductor package
11
via wires
18
. External connecting terminals
19
such as solder balls for bonding the conductive connecting pattern
16
to a mother board (not shown) are fixed to the conductive connecting pattern
16
formed on the other side of the substrate
14
. By this, the electrodes of the semiconductor chip
13
are electrically connected to the external connecting terminals
19
via the connecting pattern
15
, the wiring material
17
, and the connecting pattern
16
. The semiconductor package
11
with the semiconductor chip
13
thus mounted thereon is further provided with resin
20
covering the one side of the substrate
14
and the semiconductor chip
13
for the purpose of protecting the surface
13
a
where the element is formed and the wires
18
. By this, the semiconductor chip
13
and the wires
18
are sealed with the resin
20
.
However, with the semiconductor device shown in
FIG. 8
, in order to decrease the thermal stress between the substrate
4
and the semiconductor chip
3
, ceramics, which are expensive, have to be used as the material of the substrate
4
, leading to high cost as a whole, which is a problem to be solved.
Further, with the semiconductor device
10
shown in
FIG. 9
, although, since the thermal stress between the substrate
14
and the semiconductor chip
13
can be absorbed by the wires
18
, glass epoxy resin, which is inexpensive, can be used as the material of the substrate
14
, since the wires
18
are disposed so as to go around to the outer peripheral side of the semiconductor chip
13
in this structure, the size of the semiconductor device
10
as a whole with respect to the semiconductor chip
13
is large, and thus, the semiconductor device
10
can not sufficiently meet the demands for miniaturizing and thinning the semiconductor device.
SUMMARY OF THE INVENTION
The present invention is made in view of the above, and therefore an object of the invention is to provide a semiconductor device which is of substantially the same size as a semiconductor chip, which thus sufficiently meets the demands for miniaturizing and thinning the semiconductor device, and which, at the same time, can be manufactured at a low cost, a manufacturing method thereof, and a semiconductor package suitably used in manufacturing the semiconductor device.
According to one aspect of the present invention, in order to solve the above-mentioned problem, a semiconductor package is comprised of a substrate for mounting a semiconductor chip thereon to fix the side of a surface where the element is formed of the semiconductor chip to one side thereof, and a connecting pattern provided on the other side of the substrate for electrical connection to the semiconductor chip, the substrate being provided with a elongate opening formed from the one side to the other side of the substrate.
With this semiconductor package, since a elongate opening is formed in the substrate and the connecting pattern is provided on the side of the substrate opposite to the side on which the surface where the element is formed of the semiconductor chip is mounted, an electrode formed on the surface where the element is formed of the semiconductor chip and the connecting pattern can be bonded with wires through the elongate opening. Accordingly, wires can be disposed without going around to the outer peripheral side of the semiconductor chip. This eliminates the necessity of securing space for the wires on the outer peripheral side of the semiconductor element.
Further, since wire bonding can be carried out, the wires can absorb the difference of the coefficient of thermal expansion between the semiconductor chip and the substrate, which ma
Jones Volentine, LLC
OKI Electric Industry Co., Ltd.
Potter Roy
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