Semiconductor optical device having device regions and diffracti

Active solid-state devices (e.g. – transistors – solid-state diode – Incoherent light emitter structure – In combination with or also constituting light responsive...

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257 85, 257 95, 257 98, 257432, 372 50, 372 48, 359566, H01L 3300, H01L 3112, H01L 3116

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054344344

ABSTRACT:
A semiconductor optical device including multilayer semiconductor device regions formed on a surface of a semiconductor substrate which act as an optical device respectively, and diffraction gratings formed on a back of the substrate optically coupled with at least one of said regions through the substrate. The regions have a function such as light emitting, light receiving, light amplification or light switching. The regions and gratings can be respectively formed on the surface and the back, monolithicaly, and polishing of the substrate provides a suitable thickness so that the regions and the gratings may be optically coupled with each other. The regions and gratings may be arranged at the optimum positions in the direction parallel to the substrate. Extremely precise alignment of its components and many channels can be easily obtained with compact size.

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McCormick et al., "Optomechanics of a Free-Space Photonic Switching Fabric: The System", SPIE International Symposium on Optical Applied Science & Engineering, SPIE Proceeding, vol. 1533, Paper 12, 1991, pp. 2-19.
Jahns et al., "Optical Interconnects Using Microlasers and Planar Optics", Conference Record of 1990 International Topical Meeting on Optical Computing, Apr. 8-12, 1990, Kobe, Japan, pp. 164-166.
Komatsu et al., "Polarization Independent GaAs/AlGaAS Electro-Optic Guided-Wave Directional Coupler Switch Using (111)-Oriented GaAs Substrate," Photonic Switching Topical Meeting, 1991 Technical Digest Series, Mar. 6-8, 1991, Salt Lake City, Utah, pp. 193-194.

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