Semiconductor on insulator apparatus and method

Details Semiconductor on insulator apparatus and method Semiconductor on insulator apparatus and method

2002-08-16

2008-09-23

Toledo, Fernando L (Department: 2823)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C438S479000, C438S517000

Reexamination Certificate

active

07427538

ABSTRACT:
A method and apparatus for producing a relatively thin, relatively uniform semiconductor layer which has improved carrier mobility. In an embodiment, a lattice-matched insulator layer is formed on a semiconductor substrate, and a lattice-matched semiconductor layer is formed on the insulator layer to form a relatively thin, relatively uniform semiconductor on insulator apparatus. In embodiments of the method and apparatus, energy band characteristics may be used to facilitate the extraction of the well-region minority carriers.

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