Semiconductor object pre-aligning apparatus

Details Semiconductor object pre-aligning apparatus Semiconductor object pre-aligning apparatus

1992-04-24

1993-08-24

Huppert, Michael S.

Material or article handling

Article reorienting device

Article support means rotates about a shiftable pivot point

356400, B65G 4724

Patent

active

052383547

ABSTRACT:
A prealigner for semiconductive wafers is described. The prealigner includes mechanism for holding the wafer in a non-slip manner and motive means for adjusting the position of its engagement with the wafer as necessary to make the geometric center of the wafer precisely coincident with a chosen position.

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