Optical: systems and elements – Lens – With support
Reexamination Certificate
2000-02-07
2001-06-26
Mack, Ricky (Department: 2873)
Optical: systems and elements
Lens
With support
C257S798000
Reexamination Certificate
active
06252725
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates generally to micro-optical components and, more particularly, to a method for producing monolithic micro-optical components using standard semiconductor fabrication techniques.
2. Discussion of the Related Art
Compact and simple lens systems for micro-optical devices are essential in optical communication systems. Generally, an optical communication system is comprised of independently fabricated micro-optical components that are attached to microbenches. Present optical systems use a variety of techniques for fabricating micro-optical components and for obtaining efficient coupling between micro-optical components and other micro-optical devices. For instance, these optical systems might be manually assembled from very small parts by persons using tweezers and a microscope. Although this manual approach may be feasible for limited quantities of systems, difficulty remains in achieving high output production. On the other hand, current automated assembly techniques fail to achieve the precision alignment and quality needed for most microcomponent systems.
Therefore, it is desirable to provide a monolithic micro-optical system for use in various optical communication applications. Since there are less individual components to align, the complexity of the assembly process will be decreased. Some assembly steps are entirely eliminated with the formation of a monolithic structure. This reduction in assembly complexity improves alignment accuracy, increases reliability and decreases assembly costs for a micro-optical system. The present invention solves these problems by using standard semiconductor fabrication techniques to manufacture a monolithic micro-optical system.
SUMMARY OF THE INVENTION
The present invention relates to a method for fabricating monolithic micro-optical components. The construction of the micro-optical components is accomplished by using standard semiconductor fabrication techniques. The method comprises, in one embodiment, the steps of depositing an etch stop layer onto a semiconductor substrate; depositing an optical component layer onto the etch stop layer; coating the entire surface of the optical component layer with a photoresist material; applying a photoresist mask to the photoresist material on the optical component layer; selectively etching away the optical component layer to form at least one optical column; forming a pedestal for each of the optical columns by selectively etching away the etch stop layer; and finally polishing each of the optical columns, thereby forming monolithic optical components. The method may optionally include the step of removing the photoresist mask from each of the optical columns prior to polishing the optical columns, as well as the step of depositing an antireflectivity coating onto each of the optical components.
REFERENCES:
patent: 5037199 (1991-08-01), Hlousek
patent: 5054871 (1991-10-01), Deri et al.
patent: 5514888 (1996-05-01), Sano et al.
Anderson Eric R.
Rezek Edward A.
Rochin Luis M.
Strijek Ronald L.
Tran Dean
Mack Ricky
TRW Inc.
Yatsko Michael S.
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