Semiconductor memory with increased capacitive storage capabilit

Static information storage and retrieval – Systems using particular element – Capacitors

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Details

257306, 257307, 257303, H01L 2714

Patent

active

052821595

ABSTRACT:
A semiconductor memory includes a transistor and a capacitor which are formed on a semiconductor substrate, wherein the capacitor comprises in superposed layers a first capacitor composed of an impurity diffused layer formed in a surface layer of the semiconductor substrate, a first dielectric formed on the impurity diffused layer and a lower plate electrode formed on the first dielectric and serving as a field plate; a second capacitor composed of the lower plate electrode, a second dielectric formed on the lower plate electrode and a node electrode formed on the second dielectric; and a third capacitor composed of the node electrode, a third dielectric formed on the node electrode and an upper plate electrode formed on the third dielectric.

REFERENCES:
patent: 4240092 (1980-12-01), Kuo
patent: 4460911 (1984-07-01), Salters
patent: 4641165 (1987-02-01), Iizuka et al.
patent: 4700457 (1987-10-01), Matsukawa

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