Static information storage and retrieval – Systems using particular element – Capacitors
Patent
1992-06-10
1994-01-25
LaRoche, Eugene R.
Static information storage and retrieval
Systems using particular element
Capacitors
257306, 257307, 257303, H01L 2714
Patent
active
052821595
ABSTRACT:
A semiconductor memory includes a transistor and a capacitor which are formed on a semiconductor substrate, wherein the capacitor comprises in superposed layers a first capacitor composed of an impurity diffused layer formed in a surface layer of the semiconductor substrate, a first dielectric formed on the impurity diffused layer and a lower plate electrode formed on the first dielectric and serving as a field plate; a second capacitor composed of the lower plate electrode, a second dielectric formed on the lower plate electrode and a node electrode formed on the second dielectric; and a third capacitor composed of the node electrode, a third dielectric formed on the node electrode and an upper plate electrode formed on the third dielectric.
REFERENCES:
patent: 4240092 (1980-12-01), Kuo
patent: 4460911 (1984-07-01), Salters
patent: 4641165 (1987-02-01), Iizuka et al.
patent: 4700457 (1987-10-01), Matsukawa
Tanaka Ken'ichi
Ueda Naoki
Yamauchi Yoshimitsu
LaRoche Eugene R.
Le Vu A.
Sharp Kabushiki Kaisha
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