Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate
2008-03-11
2008-03-11
Lebentritt, Michael (Department: 2812)
Semiconductor device manufacturing: process
Having magnetic or ferroelectric component
C438S239000, C257S295000, C257SE21665
Reexamination Certificate
active
07341875
ABSTRACT:
To integrate a capacitor device (40) into the region of a semiconductor memory device with a particularly small number of process steps, a lower electrode device (43) and an upper electrode device (44) of the capacitor device (40) are provided to be formed directly underneath or directly above the material region (30) which has the memory elements (20), in such a way that as a result at least a part of the material region (30) which has the memory elements (20) functions at least as part of the respective dielectric (45) between the electrodes devices (43, 44).
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International Search Report.
Written Opinion.
Nuetzel Joachim
Schloesser Till
Schwarzl Siegfried
Wurn Stefan
Infineon - Technologies AG
Lebentritt Michael
Patel Reema
Slater & Matsil L.L.P.
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