Static information storage and retrieval – Systems using particular element – Semiconductive
Patent
1986-10-31
1988-12-27
Fears, Terrell W.
Static information storage and retrieval
Systems using particular element
Semiconductive
365149, 357 236, 357 41, G11C 1134, G11C 1124, H01L 2978, H01L 2702
Patent
active
047945630
ABSTRACT:
This invention provides a semiconductor memory device for an integrated circuit comprising a semiconductor substrate of a first conductivity type, a field insulation layer on the semiconductor substrate, and a switch. This switch includes a gate insulation layer, a gate electrode on the gate insulation layer, and a pair of impurity regions of a second conductivity type in the substrate adjacent to the gate electrode. The device also includes a capacitor including a first electrode connected to one impurity region, a second electrode connected to a predetermined voltage, insulation means for separating the first and second electrodes, and groove means extending into the substrate for increasing the capacitace area of the first electrode.
A method for making the devices is also described.
REFERENCES:
patent: 4335450 (1982-06-01), Thomas
patent: 4613889 (1986-09-01), Kuo
patent: 4672410 (1987-06-01), Miura et al.
patent: 4673962 (1987-07-01), Chatterjee et al.
patent: 4688063 (1987-08-01), Lu et al.
patent: 4688064 (1987-08-01), Ogura et al.
Fears Terrell W.
Kabushiki Kaisha Toshiba
Koval Melissa J.
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