Semiconductor memory device and the fabrication method thereof

Details Semiconductor memory device and the fabrication method thereof Semiconductor memory device and the fabrication method thereof

1992-04-13

1994-06-28

Thomas, Tom

Fishing, trapping, and vermin destroying

437 44, 437 48, H01L 2170

Patent

active

053246802

ABSTRACT:
This invention relates to a semiconductor memory device having a cell array and a peripheral circuit and the fabrication method thereof. A semiconductor memory device and the fabrication method are provided wherein source and drain impurity diffusion regions of transistors constituting the cell array have an impurity concentration lower than that of source and drain impurity diffusion regions of transistors constituting the peripheral circuit Thus, the junction's breakdown voltage characteristic of the transistor in the cell array is improved, and the data inverting phenomenon and refresh characteristic deterioration problem due to the leakage current of the transistor in the peripheral circuit area are both solved.

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