Semiconductor memory device and method of manufacturing the same

Static information storage and retrieval – Systems using particular element – Semiconductive

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365 51, G11C 1300

Patent

active

044532334

ABSTRACT:
A programmable semiconductor memory device with an emitter follower type poly-silicon fuse comprises: a first semiconductor region of first conductivity type; a first insulation layer for separating elements formed in the first semiconductor region; a second semiconductor region of second conductivity type connected to the first semiconductor region, and formed in an island fashion by the first insulation layer; a third semiconductor region of first conductivity type provided in the second semiconductor region; a poly-silicon wiring layer connected to the third semiconductor region and extending over the first insulation layer, the poly-silicon wiring layer containing high concentration impurity of first conductivity and serving as a fuse; a first insulating film formed on the surface of the poly-silicon wiring layer; a second insulating film formed on the side face of the poly-silicon wiring layer; and an electrode connected to the second semiconductor region through a contact hole formed in self-alignment with the second insulating film.

REFERENCES:
patent: 3653005 (1972-03-01), Porter
patent: 3835457 (1974-09-01), Yu
patent: 4084108 (1978-04-01), Fujimoto
Tang et al., "Sub-Nanosecond Self-Aligned I.sup.2 L/MTL Circuits", 1979 IEDM Tech. DIG. 201.

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