Semiconductor memory device and method of manufacturing the same

Details Semiconductor memory device and method of manufacturing the same Semiconductor memory device and method of manufacturing the same

1996-09-24

1999-04-06

Zarabian, A.

Static information storage and retrieval

Systems using particular element

Capacitors

257308, G11C 1124

Patent

active

058927026

ABSTRACT:
In a semiconductor memory device having cylindrical capacitors, word lines and a bit line are formed on a semiconductor substrate. A cylindrical storage node is connected to a conductive layer. The cylindrical storage node is provided at its inner wall with protruded conductive conductors which protrudes in a radially inward direction of the cylindrical storage node. A surface of the cylindrical storage node is covered with a capacitor insulating film. The outer surface of the cylindrical storage node is covered with a cell plate with the capacitor insulating film therebetween.

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