Semiconductor memory device and method of manufacturing the...

Details Semiconductor memory device and method of manufacturing the... Semiconductor memory device and method of manufacturing the...

2011-07-26

2011-07-26

Tran, Minh-Loan T (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257SE29129

Reexamination Certificate

active

07986001

ABSTRACT:
A semiconductor memory device comprises: a plurality of transistors having a stacked-gate structure, each transistor including a semiconductor substrate, a gate insulator formed on the semiconductor substrate, a lower gate formed on the semiconductor substrate with the gate insulator interposed, an intergate insulator formed on the lower gate, and an upper gate formed and silicided on the lower gate with the intergate insulator interposed. A portion of the transistors has an aperture formed through the intergate insulator to connect the lower gate with the upper gate and further includes a silicide suppression region between the aperture and the gate insulator to suppress diffusion of metal atoms from the silicided upper gate.

REFERENCES:
patent: 6835978 (2004-12-01), Matsui et al.
patent: 6953965 (2005-10-01), Goda et al.
patent: 2002/0158273 (2002-10-01), Satoh et al.
patent: 2006/0244018 (2006-11-01), Kutsukake et al.
patent: 2007/0040210 (2007-02-01), Matsunaga
patent: 2007/0176224 (2007-08-01), Yaegashi
patent: 2007/0275519 (2007-11-01), Choi
patent: 2008/0048243 (2008-02-01), Morikado
patent: 2008/0185630 (2008-08-01), Aoyama et al.
patent: 2005-228868 (2005-08-01), None
Omura et al., U.S. Appl. No. 12/244,523, filed Oct. 2, 2008, entitled “Semiconductor Memory Device and Method of Manufacturing the Same”.

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