Semiconductor memory device and method for manufacturing the...

Details Semiconductor memory device and method for manufacturing the... Semiconductor memory device and method for manufacturing the...

2007-07-17

2007-07-17

Parker, Kenneth (Department: 2815)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S110000

Reexamination Certificate

active

11311841

ABSTRACT:
A semiconductor memory device includes a substrate having a semiconductor element formed thereon, an interlayer dielectric layer formed above the substrate, a plug formed in the interlayer dielectric layer, an adhesion layer formed in a region including a region above the plug, and a ferroelectric capacitor formed above the adhesion layer and having a lower electrode, a ferroelectric layer and an upper electrode, wherein an oxidized layer is formed in a part of the adhesion layer at a side wall thereof.

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