Semiconductor memory

Details Semiconductor memory Semiconductor memory

1978-01-26

1979-05-22

Hecker, Stuart N.

Static information storage and retrieval

Systems using particular element

Semiconductive

357 55, 365178, 365186, G11C 1140

Patent

active

041562895

ABSTRACT:
A semiconductor memory has at least one V-MOS transistor which includes a trench and a storage capacitor. A semiconductor substrate is doped with concentration centers of a first conductivity type and has a buried layer which is doped with concentration centers of a second conductivity type opposite to the first conductivity type. At least two additional layers are divided by the trench and have alternately differing conductivity types, the two additional layers and the buried layer being produced by diffusion and/or implantation.

REFERENCES:
patent: 4003036 (1977-01-01), Jenne

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