Semiconductor memory

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C257S321000, C257S324000

Reexamination Certificate

active

07405441

ABSTRACT:
A non-volatile semiconductor memory (30) comprising a semiconductor substrate (1) and a plurality of memory cells (19) and methods for manufacturing such a memory is provided. Each memory cell (19) comprises a charge-trapping element (5), a gate stack (20), nitride spacers (10) and electrically insulating elements (21). The charge-trapping element (5) is arranged on the semiconductor substrate (1) and comprises a nitride layer (3) sandwiched between a bottom oxide layer (2) and a top oxide layer (4), the charge-trapping element (5) having two lateral sidewalls (24) opposed to one another. The gate stack (20) is arranged on top of the charge-trapping element (5), the gate stack having two lateral sidewalls (25) opposing one another. The electrically insulating elements (21) are disposed at opposing sidewalls (24) of the charge-trapping element (5) and cover the sidewalls (24) of the charge-trapping element (5). The nitride spacers (10) cover the electrically insulating elements (21) and are arranged on opposing sidewalls (25) of the gate stack (20) and on the electrically insulating elements (21).

REFERENCES:
patent: 6232179 (2001-05-01), Sato
patent: 6335554 (2002-01-01), Yoshikawa
patent: 6475857 (2002-11-01), Kim et al.
patent: 6686242 (2004-02-01), Willer et al.
patent: 6960482 (2005-11-01), Matsumoto et al.
patent: 2001/0016406 (2001-08-01), Pan et al.
patent: 2006/0086970 (2006-04-01), Kim
patent: 1395322 (2003-02-01), None
patent: 1441480 (2003-09-01), None
patent: 1783513 (2006-06-01), None

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Semiconductor memory does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor memory, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor memory will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2762904

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.