Semiconductor manufacturing method

Details Semiconductor manufacturing method Semiconductor manufacturing method

2006-09-22

2010-11-02

Kunemund, Robert M (Department: 1714)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

C438S770000, C438S773000

Reexamination Certificate

active

07825035

ABSTRACT:
A semiconductor manufacturing method includes purging a growth chamber including a reaction product, a treatment chamber, and a glove box hermetically surrounding the growth chamber, with an inert gas atmosphere. The method also includes transferring the reaction product from the growth chamber to the treatment chamber, followed by moistening the reaction product in the treatment chamber, and extracting the moistened reaction product into the atmosphere.

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