Material or article handling – Device for emptying portable receptacle – With jarring means
Patent
1997-11-28
1999-11-09
Ellis, Christopher P.
Material or article handling
Device for emptying portable receptacle
With jarring means
414936, 414938, G01B 1104
Patent
active
059801883
ABSTRACT:
An apparatus and method for carrying wafers through a multi-step process for producing a semiconductor, without using a cassette, where the apparatus senses whether a wafer is mis-loaded. The apparatus includes a plurality of optical sensors positioned above the wafers for sensing whether a wafer is mis-loaded by transmitting light past circumferential edges of the wafers.
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Kim Kyung-Soo
Ko Yong-in
Park Jae-bum
Park Jae-sang
Ellis Christopher P.
Parker Isobel A.
Samsung Electronics Co,. Ltd.
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