Semiconductor manufacturing apparatus, management apparatus...

Details Semiconductor manufacturing apparatus, management apparatus... Semiconductor manufacturing apparatus, management apparatus...

2006-06-20

2006-06-20

Dinh, Paul (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C700S108000, C700S110000, C702S183000, C702S185000

Reexamination Certificate

active

07065725

ABSTRACT:
A semiconductor manufacturing apparatus having a plurality of portions according to this invention includes a storage device which stores, for each portion, information representing the lapsed time of use or the product processing count till occurrence of a failure after installation of the portion, and a calculation device which receives the information stored in the storage device and outputs function information representing a failure probability and/or failure rate as a function of the lapsed time of use or the product processing count for each portion.

REFERENCES:
patent: 6202037 (2001-03-01), Hattori et al.
patent: 2002/0059012 (2002-05-01), Ogawa et al.
patent: 2-181299 (1990-07-01), None
patent: 2000-124094 (2000-04-01), None
patent: 2001-326150 (2001-11-01), None
patent: 2002-25877 (2002-01-01), None

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