Handling: hand and hoist-line implements – Utilizing fluid pressure – Venturi effect
Patent
1996-09-12
1998-08-11
Kramer, Dean
Handling: hand and hoist-line implements
Utilizing fluid pressure
Venturi effect
414941, B25J 1506
Patent
active
057917094
ABSTRACT:
A semiconductor manufacturing apparatus using a suctorial device for handling wafers includes a main vacuum line, a manufacturing apparatus for performing predetermined manufacturing processes with respect to the wafers, and a vacuum line for connecting the main vacuum line to the suctorial device. The vacuum line has a first vacuum line directly connected to the main vacuum line, and a second vacuum line having one end connected to the first vacuum line, the other end connected to the suctorial device through a connector installed in the manufacturing apparatus and a body installed in the manufacturing apparatus. The manufacturing apparatus may also contain a plurality of suctorial devices with a corresponding plurality of second vacuum lines and connectors.
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Chyun Ki-hyun
Kim Yong-su
Kramer Dean
Samsung Electronics Co,. Ltd.
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