Semiconductor manufacturing apparatus for transferring articles

Details Semiconductor manufacturing apparatus for transferring articles Semiconductor manufacturing apparatus for transferring articles

1997-02-06

1999-10-26

Underwood, Donald W.

Material or article handling

Process

414805, 414806, 414939, B65G 6500

Patent

active

059717017

ABSTRACT:
In order to manufacture a semiconductor device of high performance a small-sized transfer arm mechanism, capable of retaining a predetermined transfer stroke, is put to practical use without any increase in the height of the arm mechanism. The transfer arm includes arcuate portions having center axes different from each other, and restraint generating means for generating restraints in directions where the individual center axes are attracted. This way, a plurality of arms are joined by joints having a structure for transmitting rolling motions to the arcuate portions contacting each other to thereby control the drive shaft of the arcuate portions rotationally and thereby move the arms. This transfer arm mechanism is used in various environments including semiconductor manufacturing, such as DRAMs (dynamic random access memory).

REFERENCES:
patent: 4730976 (1988-03-01), Davis et al.
patent: 4951601 (1990-08-01), Maydan et al.
patent: 5147175 (1992-09-01), Tada
patent: 5186718 (1993-02-01), Tepman et al.
patent: 5227708 (1993-07-01), Lowrance
patent: 5288199 (1994-02-01), Enomoto
patent: 5447409 (1995-09-01), Grunes et al.
patent: 5570994 (1996-11-01), Somekh et al.
patent: 5636963 (1997-06-01), Haraguchi et al.
patent: 5697749 (1997-12-01), Iwabuchi et al.
Y. Kawamura et al, "A Wafer-Handling Interface That Operates Under Process Chamber Ambient Conditions", ISSM '96, Oct. 1996, pp. 117-120.
ISSM '96, Oct. 2, 1996, Tokyo.

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