Semiconductor manufacturing apparatus and wafer processing...

Details Semiconductor manufacturing apparatus and wafer processing... Semiconductor manufacturing apparatus and wafer processing...

2006-06-26

2009-02-24

Stafira, Michael P (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

C356S237200

Reexamination Certificate

active

07495757

ABSTRACT:
A semiconductor manufacturing apparatus and a wafer processing method are disclosed. The semiconductor manufacturing apparatus, comprises a rotatable device for supporting a wafer. A sensor for irradiating a laser beam onto a surface of the wafer and a detector including a plurality of modules for detecting the laser beam reflected from the wafer are also included. The sensor obtains information regarding the wafer, based on a change in the surface status of the wafer, which the modules sense when the laser beam is reflected from the wafer.

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English language abstract of Korean Publication No. 10-2003-54243.
English language abstract of Korean Publication No. 10-2004-48599.
English language abstract of Japanese Publication No. 2004-179211.

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