Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
Reexamination Certificate
2005-03-15
2005-03-15
Hassanzadeh, Parviz (Department: 1763)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With measuring, sensing, detection or process control means
C118S712000
Reexamination Certificate
active
06866745
ABSTRACT:
The present invention provides an observation device installed in a chamber that is used for manufacturing semiconductor devices. The observation device includes at least two light-emission sources located at a chamber wall of the chamber, an electric power supplier supplying electric power to the light-emission sources, and a viewer port which is also installed in the chamber wall. The light-emission sources correspond in position to each other in the chamber wall, and emit light downward. The viewer port includes a quartz window so that when the light-emission sources light up the inside of the chamber, an observer can observe a wafer and the chamber inside through the viewer port.
REFERENCES:
patent: 5277746 (1994-01-01), Anderson
patent: 5331171 (1994-07-01), Bongi
patent: 20020014203 (2002-02-01), Kim et al.
IBM Technical Disclosure Bulletin, Jan. 1979, US vol. No. 21, Issue No. 8, pp. 3279-3280.
Duane Morris LLP
Hassanzadeh Parviz
Jusung Engineering Co. Ltd.
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