Semiconductor manufacturing apparatus

Details Semiconductor manufacturing apparatus Semiconductor manufacturing apparatus

1995-05-03

1997-06-03

Spisich, Mark

Brushing, scrubbing, and general cleaning

Machines

Wiping

15 151, 15 77, 15 971, 153092, 134902, 451289, 451388, H01L 21027, H01L 21304, B08B 1102

Patent

active

056342314

ABSTRACT:
An apparatus for exposing a substrate chucked on a substrate holder includes a substrate stocking device for stocking a plurality of substrates, a substrate conveying system for picking up the substrate from the substrate stocking device and conveying the substrate to the substrate, holder while chucking a portion of a rear surface of the substrate and a cleaning system for cleaning the rear surface of the substrate.

REFERENCES:
patent: 4473922 (1984-10-01), Weihe
patent: 4811443 (1989-03-01), Nishizawa
patent: 5144711 (1992-09-01), Gill, Jr.
patent: 5351360 (1994-10-01), Suzuki et al.
patent: 5361449 (1994-11-01), Akimoto
patent: 5375291 (1994-12-01), Tateyama et al.

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