Geometrical instruments – Gauge – Straightness – flatness – or alignment
Patent
1990-02-16
1992-11-17
Shoap, Allan N.
Geometrical instruments
Gauge
Straightness, flatness, or alignment
33552, 33557, 33558, 33DIG2, 33 1BB, 340653, 73 378, G01B 502, G01B 702
Patent
active
051632322
ABSTRACT:
The planarity of semiconductor device pins is measured simultaneously by multiple pneumatic comparator circuits by detecting pressure changes proportional to pin position.
REFERENCES:
patent: 2852849 (1958-09-01), Groener
patent: 3538609 (1970-11-01), Minix
patent: 4221053 (1980-09-01), Bobel, II et al.
patent: 4400884 (1983-08-01), Baresh et al.
patent: 4754555 (1988-07-01), Stillman
patent: 4774768 (1988-10-01), Chiponis
Bendix Automation & Measurement Division, "Sheffield Modular Precisionaire Gaging", Catalog No. Prec.-2102-1071, 1971.
Chiu Anthony M.
Gonzales, Jr. David
Barndt B. Peter
Donaldson Richard L.
FitzGerald Thomas R.
Shoap Allan N.
Texas Instruments Incorporated
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