Semiconductor integrated circuit fault analyzing apparatus and m

Details Semiconductor integrated circuit fault analyzing apparatus and m Semiconductor integrated circuit fault analyzing apparatus and m

1994-12-06

1996-05-28

Wieder, Kenneth A.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324 725, 250305, 250310, G01R 104

Patent

active

055215165

ABSTRACT:
A semiconductor integrated circuit fault analyzing apparatus includes an electron beam tester and controller. The electron beam tester includes an electron gun assembly for generating a primary electron beam and forms a voltage contrast image on the basis of a detection amount of secondary electrons obtained by irradiating the primary electron beam from the electron gun assembly onto a semiconductor integrated circuit serving as a target to be tested and supplied with a test pattern signal, thereby specifying a faulty circuit portion of the semiconductor integrated circuit using the formed voltage contrast image. The controller sets, immediately before the test pattern signal is supplied to the semiconductor integrated circuit, at least one of a power and a signal which are supplied to the semiconductor integrated circuit to be a voltage different from a voltage obtained in the presence of the test pattern signal to cause the electron beam tester to acquire a voltage contrast image free from charge-up phenomena in synchronism with the start of supplying the test pattern signal.

REFERENCES:
patent: 5369359 (1994-11-01), Schmitt
T. Nakamura et al., "Development of rapid voltage contrast image acquisition technique and its application to LSI fault origin localization", R91-68 CPM 91-135, Mar. 13, 1992, total 8 pages.
T. C. May et al., "Dynamic Fault Imaging of VLSI Random Logic Devices", 1984 IEEE/IRPS, pp. 95-108 (month unavailable).

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