Semiconductor integrated circuit device and process for...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S298000, C257SE27087, C257SE27088, C438S243000

Reexamination Certificate

active

07145193

ABSTRACT:
In a peripheral circuit region of a DRAM, two connection holes, for connecting a first layer line and a second layer line electrically are opened separately in two processes. After forming the connection holes, plugs are formed in the respective connection holes.

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