Semiconductor integrated circuit device and method of...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S403000

Reexamination Certificate

active

06933564

ABSTRACT:
An impurity ion of a polarity opposite to that of an impurity ion forming an n-type diffusion layer is implanted into a lower portion of the n-type diffusion region in a region, in which n-channel type MISFET is to be formed, vertically with respect to a main surface of a semiconductor to form a first p-type pocket layer. Subsequently, an impurity of a p conduction type is implanted into a region between the n-type diffusion region and the first p-type pocket layer obliquely relative to the main surface of the semiconductor substrate to form a second p-type pocket layer. In this arrangement, the concentration of the impurity ion forming the second p-type pocket layer is made higher than the concentration of the impurity ion used to form the first p-type pocket layer.

REFERENCES:
patent: 4701349 (1987-10-01), Koyanagi et al.
patent: 5578509 (1996-11-01), Fujita
patent: 6541829 (2003-04-01), Nishinohara et al.
patent: 6552398 (2003-04-01), Hsu et al.
patent: 6586294 (2003-07-01), Post et al.
patent: 62-133712 (1987-06-01), None
patent: 2000-196079 (2000-07-01), None

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