Semiconductor integrated circuit device and method for...

Static information storage and retrieval – Read/write circuit – Testing

Reexamination Certificate

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C365S200000, C365S233100

Reexamination Certificate

active

06175529

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a semiconductor integrated circuit device including a semiconductor memory, for example, a DRAM, and having a self-test function of the semiconductor memory, and a semiconductor integrated circuit device such as system LSI having a microcomputer or a logic circuit, and a semiconductor memory in a mixed relationship with each other, and having a self-test function of the semiconductor memory, and the manufacturing method thereof. More particularly, it relates to a memory self-test technique and a burn-in test technique in these semiconductor integrated circuit devices.
2. Prior Art
With recent improvements (implementation of higher density and higher integration) in a semiconductor integrated circuit device, a so-called system LSI in which a plurality of functional blocks are integrated into one chip has become markedly prevalent. Especially, attention has been given to a mixed LSI in which a large-scale logic circuit and a large-scale DRAM are integrated into one chip in recent years. With this trend, there has earnestly been conducted a study of a function circuit for carrying out the self-test of each functional block within the chip (BIST circuit: Built In Self Test circuit).
FIG. 13
shows one example of the configuration of a conventional BIST circuit. This is an example of a BIST circuit for self-testing a large-capacity memory mounted within a chip. Referring to
FIG. 13
, a data generator
1
generates a test data
3
required for the test of a memory
2
, and an expected value data
4
in the test, and supplies the test data
3
to the memory
2
, while supplying the expected value data
4
to a data comparison circuit
5
.
An address generator
6
generates an address signal
7
required for the test of the memory
2
, and supplies it to the memory
2
. Also, the address generator
6
supplies address phase information
8
of the address signal
7
to a phase control circuit
9
.
The above-described address phase information is a signal which presents, for example, “H (high level)” when the value of the address becomes “0”. The address is generated arbitrarily, which necessitates a signal for indicating at which timing the address switches. The signal for indicating the switching of the address is the address phase information
8
. It is the phase control circuit
9
which generates memory control signals
11
such as write enable (WE) signal, output enable (OE) signal, row address strobe (RAS) signal, and column address strobe (CAS) signal required for writing to and reading from the memory
2
on the basis of this signal.
The phase control circuit
9
sends data phase information
10
back to the data generator
1
so that the test data
3
and the expected value data
4
are outputted from the data generator
1
at a required timing in accordance with the address signal
7
. The phase control circuit
9
also generates the memory control signals
11
such as WE signal, OE signal, RAS signal, and CAS signal required for the test of the writing to and reading from the memory
2
, and supplies them to the memory
2
.
The data phase information
10
is a signal as described below. That is, a signal required for writing to and reading from the memory
2
is generated on the basis of the signal of the address phase information
8
(ex., a signal which presents “H” when the value of the address becomes “0”) at the phase control circuit
9
. In this step, the data to be written to the memory
2
and the data to be read from the memory
2
are both required to be generated in accordance with the timing. It is the data phase information
10
which indicates the timing. Data is generated from the data generator
1
on the basis of this signal.
The data generator
1
, the address generator
6
, and the phase control circuit
9
are capable of generating data of plural kinds of patterns, and are controlled by a mode control circuit
12
.
The test of the memory
2
is carried out in the following procedure. That is, the test data
3
is written to the address indicated by the address signal
7
of the memory
2
. Thereafter, data is read from the same address of the memory
2
. Then, the comparison between the read data, i.e., memory actual output data
13
and the expected value data
4
is performed by the data comparison circuit
5
. When the expected value data
4
matches the memory actual output data
13
, a pass/fail flag signal
5
A outputted from the data comparison circuit
5
has a value indicating the pass state (ex., “L (Low level)”, while in the case of mismatch therebetween, the pass/fail flag signal
5
A has a value indicating the fail state (ex., “H”). It is noted that, as the test results, the pass/fail flag signal
5
A is outputted, and a failed address is also outputted at the time of fail. The failed address denotes the output of the address generator
6
when a fail has occurred, i.e., address data. The procedure varies differently depending on the configuration of a BIST circuit. For example, in the case where the pass/fail flag signal
5
A is set to present “H” at the time of fail, and the next address is to be accessed after evaluation, the output obtained by performing an AND operation between the output of the address generator
6
and the pass/fail flag signal
5
A can be properly provided.
FIG. 14
shows a block diagram of a logic circuit/DRAM mixed system LSI as semiconductor integrated circuit device. Referring to
FIG. 14
, a system LSI
100
is comprised of a logic circuit
101
, a DRAM
102
, selectors
103
,
104
,
105
,
106
,
107
, and
108
switched by a mode switching signal
14
outputted from the logic circuit
101
, input terminals
109
,
110
,
111
, and
112
, a clock terminal
113
, and output terminals
114
and
115
. It is noted that a microcomputer may sometimes be used in place of the logic circuit.
In the system LSI
100
having the above-described configuration, the signals inputted from the input terminals
109
to
112
are supplied to the logic circuit
101
, while they are each supplied to its corresponding one of respective input ends of the selectors
103
to
106
. Also, a part of the output of the logic circuit
101
is supplied to the other input end of each of the selectors
103
to
106
. Of the respective two inputs of the selectors
103
to
106
, the ones selected by the mode switching signal
14
are supplied to the DRAM
102
as input. Also, the output of the DRAM
102
is supplied to the one of two input ends of each of the selectors
107
and
108
, while the remainder of the output of the logic circuit
101
is supplied to the other of two input ends of each of the selectors
107
and
108
. Of the respective two inputs of the selectors
107
and
108
, the ones selected by the mode switching signal
14
are supplied to the output terminals
114
and
115
, respectively. Further, a clock is supplied in common from the clock terminal
113
to the logic circuit
101
and the DRAM
102
. However, it can be properly supplied thereto separately.
In this case, input signals to the DRAM
102
are selected depending on the time of normal operation and the time of test by the mode switching signal
14
. Further, as for the output terminal, switching is performed between output from the logic circuit
101
and output from the DRAM
102
. Specifically, during the test of the DRAM
102
, switching is performed so that the input signals from the input terminals
109
to
112
are given to the DRAM
102
, and the output signals of the DRAM
102
are outputted from the output terminals
114
and
115
, respectively. On the other hand, at the time of normal operation, the selectors
103
to
106
switch so that signals are inputted from the logic circuit
101
to the DRAM
102
, while the selectors
107
and
108
switch so that the signal of the logic circuit
101
is outputted.
However, the circuit configuration cited in Prior Art has the following four problems.
A first problem is as follows: that is, the direct comparison between

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