Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reissue Patent
2011-04-12
2011-04-12
Whitmore, Stacy A (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
C716S111000, C716S136000, C716S119000
Reissue Patent
active
RE042294
ABSTRACT:
A method for designing a semiconductor integrated circuit is provided which comprises compacting a design layout of a semiconductor integrated circuit on the basis of a given design rule to obtain a compacted pattern, predicting a pattern to be formed at a surface area of a wafer for forming the semiconductor integrated circuit on the basis of the compacted pattern, obtaining an evaluated value by comparing the predicted pattern with the compacted pattern, deciding whether the evaluated value satisfies a predetermined condition, and modifying the design rule when the evaluated value is decided as not satisfying the predetermined condition.
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Inoue Soichi
Kotani Toshiya
Tanaka Satoshi
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Kabushiki Kaisha Toshiba
Whitmore Stacy A
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